PMC Standard Tolerances
1.0 Purpose:
The purpose of this procedure is to document the standard manufacturing tolerances that are used by PMC Machining in the production of Cr sputtering targets.
2.0 Scope:
These standard tolerances apply, in lieu of a customer having defined requirements.
3.0 Dimensional/Mechanical/Physical Tolerances:
Parameter
|
Standard Tolerances (US)
|
Standard Tolerances (Metric)
|
Length < 20.0”
|
+/- .005”
|
+/- .13 mm
|
Length > 20.0”
|
+/- .010”
|
+/- .25 mm
|
Width < 10.0”
|
+/- .005”
|
+/- .13 mm
|
Width > 10.0”
|
+/- .010”
|
+/- .25 mm
|
Thickness
|
+/- .005”
|
+/- .13 mm
|
Outside Diameters
|
+/- .008”
|
+/- .20 mm
|
Inside Diameters
|
+/- .008”
|
+/- .20 mm
|
Chamfers
|
+/- .010”
|
+/- .25 mm
|
Flatness
|
< .003”/Linear inch
|
< .075 mm/Linear mm
|
Parallelism
|
< .003”/Linear inch
|
< .075 mm/Linear mm
|
Perpendicularity
|
< .005”
|
< .13 mm
|
Concentricity
|
< .005”
|
< .13 mm
|
Surface Finish: Rectangles
|
< 32µ” Ra
|
< .8 µm Ra
|
Surface Finish: Rounds
|
< 63µ” Ra
|
< 1.6 µm Ra
|
Grainsize
|
< 7085 µ”
|
< 180 µm
|
Theoretical Density: 7.19 g/cc
|
> 99% of Theoretical
|
> 99% of Theoretical
|
4.0 Standard Chemical Impurity Tolerances for Single Element Targets:
4.1 Cr: Grade 99.95 (Total Metallics < 500 ppm)
Metallic Elements
|
Impurity (ppm)
|
Fe
|
< 300
|
Ni
|
< 75
|
Cu
|
< 75
|
Si
|
< 100
|
Al
|
< 75
|
|
|
Gases
|
Impurity (ppm)
|
O
|
< 300
|
N
|
< 100
|
C
|
< 100
|
S
|
< 100
|
|
|
4.2 Cr: Grade 99.9 (Total Metallics < 1000 ppm)
Metallic Elements
|
Impurity (ppm)
|
Fe
|
< 500
|
Ni
|
< 100
|
Cu
|
< 100
|
Si
|
< 200
|
Al
|
< 100
|
|
|
Gases
|
Impurity (ppm)
|
O
|
< 500
|
N
|
< 150
|
C
|
< 150
|
S
|
< 150
|
|
|
4.3 Cr: Grade 99.5 ( Total Metallics < 5000 ppm)
Metallic Elements
|
Impurity (ppm)
|
Fe
|
< 2000
|
|
|
Gases
|
Impurity (ppm)
|
O
|
< 5000
|
N
|
< 250
|
C
|
< 250
|
S
|
< 250
|
|
|